Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403


한국표면공학회지 (44권1호 26-31)

Numerical Modeling of Perturbation Effects of Electrostatic Probe into 2D ICP(inductively coupled plasma)

2D-ICP(inductively coupled plasma)에서 정전 탐침 삽입 시의 플라즈마 수치 계산

Joo, Jung-Hoon;

군산대학교 공과대학 신소재공학과, 플라즈마 소재 응용 센터;
Department of Materials Science and Engineering and Plasma Materials Research Center, Kunsan National University;

DOI : 10.5695/JKISE.2011.44.1.026


Numerical modeling is used to investigate the perturbation of a single Langmuir probe (0.2 mm diameter shielded with 6 mm insulator) inserted along the center axis of a cylindrical inductively coupled plasma chamber filled with Ar at 10 mTorr and driven by 13 MHz. The probe was driven by a sine wave. When the probe tip is close to a substrate by 24.5 mm, the probe characteristics was unperturbed. At 10 mm above the substrate, the time averaged electric potential distribution around the tip was severly distorted making a normal probe analysis impossible.


Electrostatic probe;Inductively coupled plasma;Numerical modeling;Plasma;Computational fluid dynamics;