한국표면공학회지 (37권5호 243-248)
A Study on the Pd-Ni Alloy Hydrogen Membrane Using the Sputter Deposition
스퍼터 증착 방식으로 제조된 Pd-Ni 합금 수소 분리막 연구
김동원;박정원;김상호;박종수;
Kim Dong-Won;Park Jeong-Won;Kim Sang-Ho;Park Jong-Su;
경기대학교 신소재공학과;한국기술교육대학교 신소재공학과;한국에너지기술연구원;
A palladium-nikel(Pd-Ni) alloy composite membrane has been fabricated on microporous nickel support formed with nickel powder. Plasma surface treatment process is introduced as pre-treatment process instead of HCI activation. Pd coating layer was prepared by dc magnetron sputtering deposition after
Porous nikel metal support;Pd-Ni alloy hydrogen membrane;Plasma surface treatment;Electro plating;Sputtering deposition;