Phase Characterization and Oxidation Behavior of Ti-Al-N and Ti-Al-Si-N Coatings
Ti-Al-N과 Ti-Al-Si-N 코팅막의 상 특성 및 내산화 거동
김정욱;전준하;조건;김광호;
Kim, Jung-Wook;Jeon, Jun-Ha;Cho, Gun;Kim, Kwang-Ho;
부산대학교 재료공학부 기계박막재료연구실;
School of Materials Science and Engineering, Pusan National University;
Ti-Al-N ($Ti_{75}$ $Al_{25}$ N) and Ti-Al-Si-N ($Ti_{69}$ $Al_{23}$ $Si_{8}$N) coatings synthesized by a DC magnetron sputtering technique were studied comparatively with respect to phase characterization and high-temperature oxidation behavior. $Ti_{69}$ $Al_{23}$ $Si_{ 8}$N coating had a nanocomposite microstructure consisting of nanosized(Ti,Al,Si)N crystallites and amorphous $Si_3$$N_4$, with smooth surface morphology. Ti-Al-N coating of which surface $Al_2$$O_3$ layer formed during oxidation suppressed further oxidation. It was sufficiently stable against oxidation up to about $700^{circ}C$. Ti-Al-Si-N coating showed better oxidation resistance because both surface Ab03 and near-surface $SiO_2$ layers suppressed further oxidation. XRD, GDOES, XPS, and scratch tests were performed.
PDF